| Wavefront | Interferometer 4-24”, Shack-Hartmann-Wavefront-Sensor (UV, DUV, VIS, NIR) |
| Form deviation | 3D-coordinate measurement, Caliper, CCD-Micrometer, Stitching interferometer |
| Angle precision | Goniometer, interferometer |
| Transmission/reflection | Spectrophotometer, diode array |
| Surface defects | Automatic traveling microscope |
| Micro roughness | White light interferometer, AFM |
| Imaging performance/resolution | Computer-supported MTF-measurement, microscope picture resolution test |
| Centering | Objective metrology station, laser centering station |
| Additional functional measurement | Assembly-specific metrology station |


